Abstract
Planar optical waveguides in KTaxNb1-xO3 (KTN) crystals were formed by 3.0 MeV C ion implantation with the dose of 1×1015 ions cm-2 and 500 keV proton implantation with the dose of 2×1016 ions cm-2, respectively. The modes in KTN waveguides were measured by a model 2010 prism coupler, four dark modes were observed at 633 nm, while only one mode was observed at 1539 nm for the waveguide formed by C ion implantation. Reflectivity calculation method (RCM) was applied to simulate the refractive index profile in waveguides. The SRIM'2006 (the Stopping and Range of Ions in Matter) code was applied for simulating the process of the ion implantation in order to obtain a better understanding for the waveguide formation.
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