Abstract
The optical properties of HfO2 have practical applications. As an important gate dielectric material with high-k dielectric, HfO2 is beneficial to reduce the leakage current of the complementary metal-oxide-semiconductor (CMOS) gate and improves the gate structure. HfO2 also plays a key role in optical coating materials field for its high transmittance in the ultraviolet to near-infrared band, and high laser damage threshold. Therefore, it is of practical significance for the accurate knowledge of optical properties of HfO2. Here we present the optical constants and dielectric function of HfO2 based on the energy loss function (ELF) in the energy loss range of 0–200 eV for nanocrystalline film. Our new data are derived from the analysis of the reflected electron energy loss spectra by using the latest version of our reverse Monte Carlo modelling. Sum rules are used to check the reliability of the new data. We have found that up to 30 eV there are three main peaks, and the first-principles calculation also confirms the three peak structures. A comparison with previous results indicates that the ELF peak positions of HfO2 with different crystal structures are similar, but the peak intensity and shape are different. The heterogenicity of the crystal structure of HfO2 leads to different measurement results for different samples.
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