Abstract
Optical emission spectroscopy of atomic lines and molecular vibrational bands in N 2, H 2/N 2 and Ar/N 2 plasmas at steel nitriding conditions have been reported as an application of this diagnostic to plasma nitriding. An increase in Ar I intensity as Ar percentage increases in an Ar/N 2 mixture is observed, while the effect on N 2 + emission has a decrease, just the reverse of Ar I emission profile. As electron energy distribution function, EEDF, shifted to high electron energy as Ar percentage increases in the mixture, the presence of high-energy electron at high gas temperature of discharge can be predicted. It has also been found that pressure effect on N 2 + band in pure nitrogen plasma is to increase the band intensities. Spatial distribution of N 2 +(0,1) and N 2 +(0,2) emission profile in N 2/H 2 mixture reveals shrinking of negative glow by 10 mm in the presence of 10% H 2 and 90% N 2 relative to a pure N 2 plasma.
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