Abstract

Zirconium oxide (ZrO2) and doped with boron (B) thin films were prepared by Chemical spray pyrolysis CSP. Optical band gap energy of the films decreased from 3.83 to 3.73.55 eV via increase of doping. X-XRD patterns disclosed that films structure were polycrystalline, mixture of monoclinic and tetragonal phases. Atomic force microscopy (AFM) results assure dependence of surface morphology and roughness upon doping.

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