One-dimensional image scaling with a reflecting X-ray mask

Abstract

The work deals with the issue of miniaturization of template images using X-ray radiation. The compression method is based on the fact that X-ray radiation is directed at a specific template that reflects X-ray radiation at an grazing angle and a one-dimensional compressed image is recorded on a plane not parallel to the plane of the template. The advantage of this method of image compression is the relative simplicity of its implementation. The paper proposes the use of X-ray multilayer mirrors as reflective X-ray masks (RXM) for one-dimensional image compression. Control of the structural parameters of multilayer mirrors was carried out on a DRON- 3M X-ray diffractometer. The RXM template was formed by sputtering an absorbing WC layer with a thickness of ~0.2 μm through a certain stencil on the surface of a multilayer mirror. The test of the RXM with mirrors based on a pair of WC/Si materials in synchrotron radiation (l~3.5 nm) was carried out. A 14-fold compression of the reflective segments of the RXM with a size of ~50 μm was obtained. Theoretically, the principle possibility of obtaining compression of reflective segments to submicron sizes is shown.