Abstract
This paper reported an experimental study on ultra-precision grinding for micro aspherical lens mould. One-point grinding mode and inclined axis grinding mode are employed and investigated in grinding process. Grinding test of a micro-lens mould using form error compensation technique is conducted. The experimental results show that ground micro aspheric mould surfaces with form (PV) around 0.122 µm and a roughness (Ra) less than 2 nm is achieved successfully.
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