Abstract
With the widespread application of various small aspheric optical components, high-precision manufacturing technology of forming molds is deeply demanded. However, the ultra-precision grinding technology of small-aperture aspheric mould is still undeveloped. An ultraprecision grinding technique called tilt axis grinding which is based on the grinding spindle is tilt with the axis of aspheric surface and profile error compensation of aspheric mould are studied. Through constructing geometric model of the tilt axis grinding, the tool path and the interference conditions were calculated. The form error was compensated with the data measured by profiler. An experimental test is conducted to grind an aspheric tungsten carbide mould of aperture 5 mm, and the profile accuracy is gradually improved from 0.652 μm to 89.3 nm in PV after two compensation cycles. The surface roughness is 10 nm in Ra.
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