One GHz leaky SAW velocity of metal layers and bilayers evaporated onto fused quartz

Abstract

An acoustic microscope operating at 1 GHz was used to determine the surface acoustic wave velocities v of thin film metal layers and metal bilayers deposited onto fused quartz. V(0)’s influence was reduced by gating. This produced a calibrated accuracy of 3%. A program was constructed from the explicitly solved 6×6 theoretical determinant. Single film thicknesses were decided upon by using this theory to produce a v equal to a standard. Since the single film v’s were linear with respect to their thickness, half the single film thicknesses were used for the bilayered films. The velocities for these bilayered films agreed with theory. This experimentally confirms the theoretical technique used here to examine bilayered systems, or a prototype composite interphase. No discrepancy was seen for gold films as others have reported. V(z) seemed insensitive to the formation of intermetallics or CuO. Some annealed and unannealed platinum films did not change the v from that of fused quartz. Two platinum films whose v’s were in agreement with theory peeled off with the tape test.