Abstract
A new method for evaluating homogeneities of Ca 3 Ta(Ga 0.5 Al 0.5 ) 3 Si 2 O 14 (CTGAS) single crystal was investigated using leaky surface acoustic wave (LSAW) velocities measured by the line-focus-beam ultrasonic material characterization (LFB-UMC) system. LSAW velocity changes due to Al-substitution effect were successfully extracted by using a relationship between two LSAW velocities propagating along different directions for Ca 3 TaGa 3 Si 2 O 14 (CTGS) and Al-doped CTGS. Al-concentration variation of 0.219 at% was detected in diameter direction of the crystal ingot through the LSAW velocity measurements for Y-cut CTGAS specimen. The velocity resolution to Al-concentration is estimated to be ±0.0046 at% for Y-cut Z-propagating LSAW.
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