Abstract
The modification of molybdenum surfaces exposed to oxygen with concurrent ion bombardment was studied by means of Auger electron spectroscopy and x‐ray photoelectron spectroscopy. The incorporation of oxygen is greatly promoted by simultaneous particle impact during the exposure, accompanying the formation of oxides with various valence. The maximum equilibrium concentration of oxygen at the top surface seems to be determined by the highest valence oxide (MoO3 ) formed on the surface.
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