Abstract
The modifications of molybdenum surfaces exposed to oxygen at different temperatures and with concurrent ion bombardment were studied by means of secondary ion mass spectrometry. The incorporation of oxygen is greatly promoted both by raising the sample temperature from 25 to 485 ° C and by simultaneous particle impact during the exposure. For the latter case an oxygen incorporation yield of up to ∼ 5 oxygen atoms/primary ion was found. This enhanced uptake of oxygen is essentially controlled by defect-enhanced diffusion and, to a lesser extent, by recoil implantation. In addition, at sample temperatures of 485 ° C thermal diffusion becomes important for the incorporation of oxygen.
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