Abstract
The objective of this study is to model a surface-wave plasma (SWP) source. An additional objective is to use the simulation results to design a high–density and low–pressure operation plasma source. One of the solutions for low-pressure SWP is done in this study by applying a magnetic field. Moreover, a large dielectric disk is used for excitation and control of the surface wave. A precise and fast solution to the equation of electron motion for computer calculation is presented to predict the effects of magnetic and evanescent electric fields on plasma. A standing surface wave discharge is studied assuming that the electrical orbits in the SWP are affected by magnetic confinement and ponderomotive force. The net result is that the electrons in the static magnetic field are trapped firmly and the effects on the electron orbits by the electric field are relatively small.
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