Abstract
The nucleation and growth of diamond films on molybdenum were investigated by scanning electron microscopy and Raman spectroscopy. Diamond films were deposited by hot-filament chemical vapor deposition via electron emission-enhanced nucleation, in which a dc negative voltage relative to the filament was applied to a tungsten electrode that was previously coated with diamond, by chemical vapor deposition. The electrode-to-substrate distance was one of the deposition variables. The maximum value of the nucleation density was found to be up to 10 11 cm −2 on a pristine Mo surface by electron emission-enhanced nucleation. Electron emission-enhanced nucleation also greatly improved the quality and adhesion of diamond films on a Mo substrate.
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