Abstract
In order to determine the beam spot size, scan size and scanning properties of a nuclear microprobe system a novel test sample with nanometer structures for the use in submicron ion-beam analysis has been developed by the University of Leipzig and the Institute for Surface Modification (IOM). The test sample provides horizontally and vertically arranged periodic structures, which range from 4 μm to 150 nm in size. The structures have been produced in SiO 2 and Ag for topographic and elemental contrast, respectively, using electron beam lithography and various etching techniques. The test sample was investigated with a scanning electron microscope (SEM) and the high-energy ion nanoprobe LIPSION. Due to the excellent definition of the edge profiles, the ion beam spot size can be directly derived from a line scan across an edge even in the submicron regime. The structures on the test sample also allow the determination of scan sizes of a few microns. Furthermore, a special nanostructure is proposed which makes it possible to image the beam current density within a submicron beam spot directly.
Published Version
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