Abstract
To precisely quantify the deuterium (D) concentration at significant depths and enhance the understanding of D distribution in zirconium (Zr) films, the proton elastic scattering cross-section of Zr was measured on an Au/Zr/Ti thin film. The measurement was conducted at laboratory angles of 165° and 170° over an energy range of 1.5–5.0 MeV. Non-Rutherford scattering was observed at proton energies exceeding 4.43 MeV. By combining proton backscattering (PBS) and nuclear reaction analysis (NRA) at different energies, a highly precise quantification of D concentrations within deuterated zirconium film, with depth resolution below 500 nm, was achieved. Additionally, we established initial assessments of Zr, Mo, and D atom concentrations in the ZrDx/Mo film, laying the groundwork for future studies.
Published Version
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