Abstract
This paper reports on the development of several novel microelectromechanical systems (MEMS) machines based on linear Lorentz force actuators. These were monolithically fabricated and include micromachined polymer magnets. Polymer magnets allow a highly flexible definition of magnetic areas, arbitrary shape, and properties. By combining these linear actuators with mechanical compliant structures using Epon SU-8, we were able to build in-plane and out-of-plane micropositioners, micromotors, and microgrippers.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
