Abstract
This paper reports on the development of several novel MEMS machines based on linear Lorentz force actuators. These were monolithically fabricated and integrate micro machined polymer magnets. Polymer magnets allow a highly flexible definition of magnetic areas, arbitrary shape and properties. Through the combination of these linear actuators with mechanical compliant structures using Epon SU-8, in-plane and out-of-plane micro positioners, micro motors and micro grippers were realized.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
