Compact thermally actuated latching MEMS switch with large contact force

Abstract

A novel latching microelectromechanical system (MEMS) switch is reported, which uses a compact configuration of thermal actuators. In the proposed latching mechanism, the necessary displacement of one of the contacts can be reduced, allowing the use of a linear thermal actuator. This linear actuator together with a V-shaped actuator can be aligned next to each other, requiring less area than the classical latching switch design. Another advantage of the proposed design is the high contact force of 1.33 mN, ensuring a stable contact resistance. The latching switch was fabricated in the Metal multi-user MEMS processes (MUMPs) technology and its functionality was successfully tested. In the latched state, a switch resistance of 0.6 Ω was measured.