Abstract
Recent progress achieved in the international community on pulsed collisionally excited coherent and incoherent primary sources emitting at very short wavelength are reviewed. Enphasis is made on Rg 2 rare gas excimers, rare gas-alkali and alkali-halogen ionic excimers, UV-VUV emissions from surface discharge, and long pulse high efficiency KrCI excimer laser (x = 222 nm). These systems are discussed as well as their perspectives and potential applications.
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