Abstract

New excimer sources in VUV spectral region have been reviewed in this paper, where rare gas excimers and ionic alkali halide excimers were focused on. Electron beam pumped rare gas excimer lasers were developed as coherent light sources. Their applications to materials processing were explored in detail. Rare gas jet excimer lamps and silent discharge excimer lamps were discussed as incoherent light sources. Ionic alkali halide excimers excited by a laser-produced plasma were also discussed. Possible applications of VUV excimer light were presented.

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