Note on the NMR lineshape of H in hydrogenated amorphous Si and Si-N alloy films

Abstract

H NMR measurements were performed in hydrogenated amorphous SiN alloy films (aSi 1- x N x :H) prepared at 350 °C. When x < 0.2, H NMR signals consist of a narrow Lorentzian line and a broad Gaussian line as in the case of aSi:H. When x > 0.2, the Gaussian lineshape approaches a bell-shape. Such a change in the lineshape can be explained by the decrease in the randomness in the H distribution. The lineshape of H NMR in aSi:H prepared at 40 °C is analogous to that in aSi 1- x N x :H with x > 0.2 prepared at 350 °C, and the result can be explained similarly.