Abstract

Nickel nanocrystal (Ni-NC)-embedded titanium dioxide films have been deposited for nonvolatile resistive switching memory devices. The polycrystalline behavior of the films has been observed from the X-ray diffraction spectra. Tiny isolated Ni-NCs with an average size of 4 nm are observed for the 1000 °C, 5-min annealed samples. Stable, bipolar, nonvolatile, and bistable resistive switching states are observed for the optimized annealed Ni-NC-embedded devices with a low SET and RESET voltage of 0.8 and −0.2 V, respectively. A high resistance ratio (>10 <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$^3$</tex></formula> ), good stability, and retention properties are observed for the nanocrystal sample. The role of thin Ni-NC layer on memory switching stability is discussed.

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