Abstract

AbstractLow‐pressure plasmas are known for their ability to synthesize nanoparticles via gas‐phase nucleation. While in the past this particle formation has often been considered from the viewpoint of a contamination problem in semiconductor processing, we here describe a low‐pressure plasma that enables the synthesis of faceted germanium nanocrystals. The germanium nanocrystals are generally single crystals without any planar defects such as twin boundaries. A change in the morphology with particle size is observed. Small germanium particles up to about 30 nm in size are mostly cubes with (100) crystal facets. Larger crystals between 30–60 nm are primarily cuboctahedrons. Even larger nanocrystals are mainly spherical. The shape evolution is interpreted in terms of the equilibrium shape of hydrogen‐coated germanium crystals. Possible applications of these crystals are discussed.

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