Abstract

This paper presents a global sensitivity analysis of a high-Q partially air-filled pedestal resonator integrated in a printed circuit board. Nonlinear partial-least-squares-based polynomial chaos expansion (NLPLS-based PCE) approach is used for the global sensitivity analysis. Using NLPLS-based PCE a surrogate model is constructed with a reduced dimensionality, which enhances the performance of the algorithm. A standard PCE surrogate model, with all the system parameters, is created from the reduced NLPLS-based PCE surrogate model. The statistical information needed to perform the sensitivity analysis, i.e., variance, is extracted from the standard PCE surrogate model. A variance-based global sensitivity analysis is performed on the PCE model, each system parameter's sensitivity is quantified as the partial influence on the total variance of the performance variable S11. The chosen manufacturing technology involves a three-stage process: micromachining of the cavity, metallization, and thermos-diffusion stacking. During the three stages several problems may occur that can have an influence on the performance of the resonator, such as shape and size variation, and misalignment. The system parameters are set up according to these most common problems. The results show that, of the 8 system parameters chosen to evaluate, the height of the cavity and pedestal are the most sensitive parameters.

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