Abstract

A nonlinear formulation of the displacement cascade is described using the Boltzmann equation with a stochastic collision kernel. For the special case of the very hard sphere model the resulting exact solution is used to assess the limitations of the linear theory for calculating sputtered atom spectra and yields. Significant differences are found in the two cases, amounting to factors of 2 in some energy regions. The extension of the method to more realistic kernels is outlined.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.