Abstract
Nonlinear Analysis of Pull-In Voltage of Twin Micro-Cantilever Beams
Highlights
Pull-in voltage represents an important parameter for micro-cantilever beams when subjected to local electric fields
The pull-in voltage dictates the limited performance of the investigated device that is the voltage at which the system becomes irreversible unstable
The pull-in voltage can be calculated from the differential equation that describes the model of the dynamic behaviour of the micro-cantilever beam subjected to an electrostatic field
Summary
Pull-in voltage represents an important parameter for micro-cantilever beams when subjected to local electric fields. Perturbation method [6] and Runge-Kutta algorithms represent other approaches of solving the derived Duffing equations that are used to model the dynamic behaviour of the micro-cantilever beam subjected to both electric field and harmonic excitations. These methods are applicable to a Duffing equation as it is not a stiff equation. Another approach assumes small deflections of the structures involved and the results are compared with the experimental data [1] This method is not very suitable due to the nature of the large deflection of micro-cantilever beams in electric field [7]. The effects of variation of the width and thickness of the micro-cantilever beam on the resonant frequency were the subject of several theoretical and experimental studies [10]
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