Abstract
Films deposited via cathodic arc technology from a 304 stainless-steel cathode were investigated as a function of angle measured from the normal to the surface of the cathode. The composition of the films as measured via energy dispersive x-ray analysis was found to vary with the position of the substrate. In addition the top and bottom layers of the films at all positions were found to be rich in chromium. These results can be understood as stemming from preferential evaporation of Cr from the droplets that are a part of the cathodic arc emission process.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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