Abstract
In conjunction with our experimental work on sputtering with a saddle-field ion source, the Monte-Carlo program TRansport of Ions in Matter (TRIM) was applied to calculate the sputter yields for a variety of noble gas sputtering applications. Comparison with experiments are shown. Information extracted from these analyses have proved useful in optimizing the experimental sputtering parameters. Calculated sputter yields obtained utilizing TRIM are presented for noble gas sputtering of a variety of materials common to nuclear target preparation.
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