Abstract
This paper discusses a new method of diffraction monitoring of small angular and linear displacements, based on a diffraction interferometer setup in which both interfering wave fronts are formed by diffraction elements. A mathematical model is obtained that describes a radiation-intensity distribution in the recording plane that agrees well with the experimental results. The calculated results showed that a compact diffraction autocollimator and a linear-displacement indicator could be created that possess high potential resolving power (up to 0.01′′ and 2 nm, respectively) with the possibility of varying the sensitivity and measurement range of the absolute values of the angular and linear quantities by more than an order of magnitude.
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