Abstract
A rate calculation and new kinetics model have been applied to a short pulse, high power XeCl laser, in order that the UV preionization design for large volume glow discharge is realized. A laser beam of 450 mJ, 15 ns duration, cross section of 2 × 1.78 cm2, cavity length of preionization and glow discharge 900 mm, and a beam quality element of 3.5 cm along the discharge direction and 2.1 cm along the y direction has been achieved. It shows that, the laser in the composition of gas mixtures HCl : Xe : He = 0.1% : 1% : 98.9%, 37.5 kV indicates a best pulse profile with more than 5.4% efficiency and a beam divergence angle smaller than 3 mrad. The laser acting on CMR and quartz material makes block materials eject plasma spilling eclosion without burning etching.
Published Version
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