Abstract

Nippon EMC Ltd is Japan's oldest and most successful manufacturer of metal-organic phase vapour epitaxy (MOPVE) systems. The company was awarded a New Energy and Industrial Technology Development Organization (NEDO) grant for the development of hydride vapour phase epitaxy (HVPE) systems for mass production of GaN substrates. The results of the new NEDO project will contribute to increasing demands for Group III nitride-based semiconductor devices for next generation DVD, high brightness LEDs and high frequency, high power nitride heterostructure electron devices for telecoms.

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