NanoSurf IV: traceable measurement of surface texture at the National Physical Laboratory, UK

Abstract

A new surface texture measuring instrument, NanoSurf IV, has been developed at the National Physical Laboratory. Laser interferometers provide traceable displacement measurements in both the vertical and scanning axes enabling surface texture to be measured with nanometre uncertainty. Provided the fidelity of the surface–probe interaction is ensured, NanoSurf IV measures the co-ordinate of a point on the surface. The instrument is designed primarily to calibrate surface texture standard specimens that can in-turn be used to calibrate other instruments. The design of the instrument, its calibration and results obtained from surface texture calibration artefacts are presented.