Abstract

A new surface texture measuring instrument, known as NanoSurf IV,has been developed at the National Physical Laboratory. Laserinterferometers provide traceable displacement measurements in both thevertical and scanning axes enabling surface texture to be measured withnanometre uncertainty. NanoSurf IV has a vertical range of 10 µmand horizontal range of 100 mm. The instrument is designed to calibratesurface texture standard specimens that can, in turn, be used to calibrateother instruments. The design of the instrument, its calibration andresults obtained from surface texture calibration artefacts are presented.

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