Abstract
A highly sensitive nanoscale mass sensor was developed for weight measurement of single microparticles using a suspended graphene structure. The sensor is composed of an array of holes covered with suspended monolayer graphene. Based on the shift of the 2D Raman peak in graphene, originating from the elongation of carbon–carbon bonds under pressure, the mass of microparticles in suspended graphene can be measured. The results show that the sensor can detect microparticles with mass ranging from 0.1 ng to 3 ng. The peak shift ratio is −69.8 cm−1 per 1% strain for the experimental value and −72.3 cm−1 per 1% strain for the calculated value. The demonstrated concept presents a promising path for nano-mass measurement applications.
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