Abstract
Applications of SPM (scanning probe microscopy) techniques for nanoscale investigation of ferroelectric Pb(Zr,Ti)O3 (PZT) thin films are described. Topics are (1) local current flow in polycrystalline Pb(Zr,Ti)O3 (PZT) thin films, (2) ferroelectric properties of nanosized PZT islands and (3) polarization switching processes in epitaxial PZT thin films and capacitors. They are investigated using atomic force microscopy (AFM), transmission electron microscopy (TEM), conductive AFM and piezoresponse scanning force microscopy (PFM).
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