Nanoscale Characterization of SiC Interfaces and Devices

Abstract

This paper reviews some recent advances in the application of scanning probe microscopy (SPM) electrical characterization techniques to several critical surface and interface issues in SiC technology. High resolution carrier profiling capabilities in SiC of scanning capacitance microscopy (SCM) and scanning spreading resistance microscopy (SSRM) were employed for several applications. These included two-dimensional (2D) imaging of doped regions in SiC devices (to be used as input for device simulations or as a feedback for device processing) and the quantitative evaluation of the electrically active profiles of P (or N) and Al implanted 4H-SiC after high temperature treatments. Furthermore, the electrical modification of the SiO2/4H-SiC interface in MOS devices subjected to post-oxide-deposition treatments in NO or N2O and POCl3have been investigated, providing quantitative information on the electrical activation of incorporated N or P in the few-nm-thick SiC interfacial region. The lateral homogeneity of metal/SiC interfaces was probed at nanoscale by conductive atomic force microscopy (CAFM), with a special emphasis given to the case of Schottky contacts on 3C-SiC, where the diode behaviour is strongly affected by the high density of electrically active defects in the substrate. Finally, CAFM has been employed to study the current transport in epitaxial graphene (EG) grown on 4H-SiC (0001), revealing the impact of the substrate morphology (terraces and steps or facets) on the local conductivity.