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https://doi.org/10.31399/asm.edfa.2022-2.p012
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Cite Journal: EDFA Technical Articles |  Publication Date: May 1, 2022 |
Affiliation: Teamtechnik (Germany)
Abstract This article discusses the challenges associated with nanoprobing advanced technology node devices and explains how to optimize SEM images for beam voltages of 100 eV or less.
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