Abstract
An array of individually addressable nanoplate field-effect capacitive (bio-)chemical sensors based on an SOI (silicon-on-insulator) structure has been developed for multi-parameter detection. An isolation of the individual capacitors was achieved by forming a trench in the top Si layer with various thicknesses of 30-350 nm. The feasibility of the proposed approach has been demonstrated by realising sensors for the detection of pH as well as for the label-free electrical monitoring of adsorption and binding of charged macromolecules.
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