Abstract
The nanomechanical properties of lead zirconate titanate (PZT) thin films weresubjected to nanoindentation evaluation. A PZT thin film was created on a siliconsubstrate by radio frequency magnetron sputtering. The structure andsurface morphology were analysed by x-ray diffraction and atomic forcemicroscopy. Results show that PZT thin films were well ordered with a high(110) orientation and presented a pure perovskite-type structure and thatthe average roughness was reduced as the annealing temperature wasincreased. The Young’s modulus and hardness increased as the rapidannealing temperature increased from 600 to 800 °C,with the best results being obtained at 800 °C.
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