Abstract
We describe the ultrasonic properties of lead zirconate titanate (PZT) thin films prepared by the sol-gel method. It is shown that the PZT thin film exhibits efficient transduction of bulk and surface acoustic waves in UHF-SHF range. A conversion loss of less than 4 dB is achieved for bulk wave excitation and detection at 1.7 GHz, where the electromechanical coupling factor k t reaches 30%. This indicates that the PZT thin film is promising for use in the development of large-bandwidth resonators and filters in modern communication systems as well as for high-frequency ultrasonic transducer applications.
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