Abstract

From the 1980s to the present, interest in carbon has remained very high. The variety of polytypic forms of carbon is expected to have a large number of possible applications. The creation of electronic and optical devices based on them is a promising direction. One of the most interesting carbon materials could be amorphous diamond-like carbon (DLC) films. This work considers nanocomposite materials based on DLC with nanostructures of SiC components. Thin composite DLC:Si films modified with Rhodium nanoparticles (Rh NPs) were synthesized by magnetron sputtering. The structure of the films has been studied by transmission electron microscopy, Raman and X-ray photoelectron spectroscopy (XPS). It is shown that a diamond-like carbon matrix with inclusions of SiC nanostructures and Rh nanocrystals is formed. Significant influence of Rh NPs on the structures of the carbon matrix and SiC during the formation of the DLC: Si matrix is revealed. In addition, X-ray photoelectron spectroscopy shows a considerable effect of Rh NPs on the edge of the valence zone and the density of localized states. The significant effect of rhodium nanoparticles on the electronic component of the valence band of DLC:Si films can be used in the development of new optoelectronic devices.

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