Abstract
We report a novel electrostatic actuated nano-electromechanical optoelectronic (NEMO) tunable vertical-cavity surface-emitting laser (VCSEL) centered at 850 nm. By integrating a movable, single-layer (230 nm), high-index-contrast subwavelength grating (HCG) as the VCSEL top mirror, single mode emission (SMSR >40 dB) and continuous wavelength tuning (~2.5 nm) was obtained at room temperature under CW operation. The small footprint of HCG enables the scaling down of each of the cantilever dimensions by a factor of 10, leading to 1000 times reduction in mass, which potentially increases the mechanical resonant frequency and tuning speed.
Highlights
The integration of micro-electromechanical structures (MEMS) with vertical-cavity surfaceemitting lasers (VCSELs) have been extensively studied as an ideal wavelength tunable source for a variety of applications, including telecommunication [1, 2], biomolecular or chemical sensing [3], spectroscopy [4], and chip-scale atomic clock [5]
While the p-distributed Bragg reflector (DBR) does increase the overall reflectivity of the top mirror, our simulation shows that the number of p-DBR pairs can be reduced since a single-layer high-index-contrast subwavelength grating (HCG) is capable for providing sufficient reflectivity (R>99.9%) as the VCSEL top mirror
With the HCG integrated as the top mirror, continuous wave (CW) operation of an electrostatic actuated nano-electromechanical optoelectronic (NEMO) tunable VCSEL was demonstrated for the first time at room temperature
Summary
The integration of micro-electromechanical structures (MEMS) with vertical-cavity surfaceemitting lasers (VCSELs) have been extensively studied as an ideal wavelength tunable source for a variety of applications, including telecommunication [1, 2], biomolecular or chemical sensing [3] , spectroscopy [4], and chip-scale atomic clock [5]. We proposed a new class of high-reflectivity mirror using a single-layer (thickness 0.23 μm or equivalently 0.27 λ for center wavelength of 850 nm) high-index-contrast subwavelength grating (HCG) instead of conventional DBR [10,11,12]. The design consists of only ONE single layer of grating structure of high refractive index material entirely surrounded by low index material (e.g. air). Using this design, a VCSEL can be fabricated using a HCG-based top mirror with thickness
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