Abstract
We report a nano-electromechanical optoelectronic (NEMO) tunable vertical-cavity surface-emitting laser (VCSEL) with an ultra-thin (145 nm) electrostatically actuated high-index-contrast subwavelength grating (HCG) designed to strongly reflect TE-polarized light. Single mode emission (SMSR >45 dB) and continuous wavelength tuning (approximately 4 nm) were obtained at room temperature with output power up to 2 mW under continuous wave (CW) operation. A record short wavelength tuning time (approximately 90 ns) is experimentally demonstrated, which is >100 times faster than previously reported DBR-based tunable VCSELs and a 1.7 times improvement over the previously reported TM polarized NEMO tunable VCSELs.
Highlights
Vertical-cavity surface-emitting lasers (VCSELs) with micro-electromechanical structures (MEMS) have been demonstrated as a compact wavelength tunable source for a variety of applications including telecommunication [1,2], bio/chemical sensing [3], and spectroscopy[4]
Continuous-wave room-temperature operation of an electrostatically actuated TE-high-index-contrast subwavelength grating (HCG) based nano-electromechanical optoelectronic (NEMO) tunable VCSEL is demonstrated for the first time
Since the high reflectivity is only available within the finite HCG pattern area, higher-order transverse modes are suppressed and a single fundamental mode emission with a 45 dB side-mode suppression ratio (SMSR) was obtained
Summary
Vertical-cavity surface-emitting lasers (VCSELs) with micro-electromechanical structures (MEMS) have been demonstrated as a compact wavelength tunable source for a variety of applications including telecommunication [1,2], bio/chemical sensing [3], and spectroscopy[4]. It has been shown that the HCG can replace conventional DBR structure as an alternative solution for VCSEL mirrors [10,11]. The original HCG is designed to strongly reflect transverse-magnetic (TM) polarized light. It is made of high refractive index material (AlGaAs) which is entirely surrounded by low index material (air). The HCG enables scaling of the mechanical tuning structure by a factor of 10 times in all dimensions, and the mass is
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