Abstract
Emission characteristics, such as ion current vs. voltage relationships, ion emission angle, ion current fluctuation, temperature effect, and mass analysis, are measured for a hydrodynamic (EHD) liquid-gallium ion source. A scanning ion microprobe system using a liquid-gallium ion source and a voltage asymmetric three-electrode lens is developed. It produces 2-20 keV Ga+ beams of 0.1-5 μm diameter with 20 pA-8nA current. This ion optical system is well suited for variable-energy microprobe applications.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
