Abstract

This paper deals with the monolithic integration of a multiphase generic static power converter (dc/ac or ac/dc). The integration aims at minimizing wire bonds in order to improve the electrical performance as well as the reliability of power converters. To that end, three multiterminal monolithic power Si chips are devised and extensively studied by 2-D simulations. The first power chip integrates the reverse-conducting IGBT devices that compose the high-side part of the converter circuit. This chip is called the common anode and is validated through experimental realizations. The second power chip integrates the reverse-conducting IGBT devices that compose the low-side part of the converter. This chip is called the common cathode chip. The common anode and cathode power chips are judiciously packaged on a Printed Circuit Board substrate over which an insulating Kapton film is laid and through which window openings are realized. The partial flip-chip packaging, of the two power chips, enables the realization of a compact power H-bridge converter with the lowest stray inductance. The third chip integrates the power converter within a single silicon chip and, consequently, eliminates wire bonds. It is considered as the ultimate integration approach. The latter is validated on a monolithic H-bridge inverter by using Sentaurus mixed-mode 2-D numerical simulations.

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