Abstract
A multilayer piezoelectric ceramic actuator with interdigital internal electrodes has been developed. The internal electrodes of this actuator are line electrodes which are printed on piezoelectric ceramic green sheets and stacked such that alternating electrode lines are displaced by one-half pitch. This actuator is displaced at right angles to the stacking direction due to the piezoelectric longitudinal effect. Therefore, it is possible to prepare a long ceramic actuator, which will be highly reliable in applications. In this work, we have obtained a displacement of 50 µm/DC350V and a generative force of 34.3 MPa for a 74-mm-long actuator. The reliability of this actuator is confirmed to have a long life of more than 1000 hours using applied voltage of DC350V at 25°C and 60%RH.
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