Abstract
Abstract A new structure for multilayer piezoelectric ceramic actuators, called the slit structure, has been proposed and various applications for multilayer piezoelectric ceramic actuators, such as an impact dot-matrix printer head, an ultrasonic motor and a fine mechanical stage, have been investigated. The slit structure actuator is suitable for low driving voltages and it is easy to fabricate. The new printer head operates at twice the printing speed with less than 1/2 of the power consumption of a conventional electromagnetic drive printer head. The ultrasonic motor, composed of an actuator and a piezoelectric torsional mode resonator, exhibits large torque with small radius. The fine mechanical stage, for use in semiconductor manufacturing equipment, has 0.01 μm linear resolution and 0.9 μrad angular resolution, respectively.
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