Abstract

In this paper we describe the development of a system and model to analyze the composition of gas mixtures up to four components. The system consists of a Coriolis mass flow sensor, density, pressure and thermal flow sensor. With this system it is possible to measure the viscosity, density, heat capacity and flow rate of the medium. In a next step the composition can be analyzed if the constituents of the mixture are known. This makes the approach universally applicable to all gasses as long as the number of components does not exceed the number of measured properties and as long as the properties are measured with a sufficient accuracy. We present measurements with binary and ternary gas mixtures, on compositions that range over an order of magnitude in value for the physical properties. Two platforms for analyses are presented. The first platform consists of sensors realized with MEMS fabrication technology. This approach allows for a system with a high level of integration. With this system we demonstrate a proof of principle for the analyses of binary mixtures with an accuracy of 10%. In the second platform we utilize more mature steel sensor technology to demonstrate the potential of this approach. We show that with this technique, binary mixtures can be measured within 1% and ternary gas mixtures within 3%.

Highlights

  • In flow dosing systems there is a demand to not just measure or control flowrate, and measure the type or composition of the flow

  • Tests were performed on two different systems, a steel sensor platform and MEMS fabricated silicon chip

  • We have designed and realized a system and model with which we can determine the composition of gas mixtures based on the combination of a pressure, density, Coriolis and thermal flow sensor

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Summary

Introduction

In flow dosing systems there is a demand to not just measure or control flowrate, and measure the type or composition of the flow. A real-time monitoring system of gas composition can help to indicate threshold levels for harmful gasses and signal when it is save to open a reaction chamber In this way such a system can facilitate a reduction of costly equipment down time and aid in operator safety. Gas chromatography and to a lesser extent gas calorimetry does not suffer from these limitations, gasses can be analyzed over a broad range with limited or no limitations of interfering compounds These systems have slow response, typically in the order of several minutes, are costly and bulky and in a continuous flow process, hard to integrate. In a second calculation step, the composition can be calculated based on the measured medium properties Since such a system utilizes standard flow measurement components the system can be kept fast, relatively low cost, easy to integrate in gas or fluid transport networks

System and Model
Results and Discussion
MEMS Sensor
Steel Sensor Technology
Conclusions
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