Abstract
Multi-layer cofired tunable capacitors (MLCTC) were fabricated with MLCC thick film technology. (Ba,Sr)TiO3 (BST) has been utilized as a tunable material. We compared the tunability of BST plate sample with that of MLCTC. Though the tunability of BST plate sample was about 80% at 5V/μm, that of MLCTC suddenly decreased at 3V/μm. This might be caused by stray capacitance of MLCTC because of high dielectric constant of via layers. In this paper, basic concepts of MLCTC and properties of tunable capacitors which have been fabricated with thick film processes are described, and further discussion to decrease stray capacitance will be discussed.
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