Mosaicity reduction during growth of heteroepitaxial diamond films on iridium buffer layers: Experimental results and numerical simulations

Abstract

Heteroepitaxial diamond films can be grown by bias enhanced nucleation on iridium buffer layers followed by an appropriate textured-growth step. Unlike epitaxial diamond films on silicon, the mosaicity reduction during textured growth includes tilt as well as twist. We conclude that different mechanisms causing the grain coarsening are working in the two cases. It is shown that the principle of evolutionary selection can be excluded as a decisive mechanism in the present films. Merging of neighboring grains by disclination formation yields an alternative explanation, that can convincingly substantiate the differences between the textured growth on iridium and silicon. From a Monte–Carlo type simulation describing the texture evolution due to merging of grains, a simple functional correlation between grain coarsening and mosaicity reduction is deduced. Comparison between simulation and experiment allows one to estimate the contributions of different processes. Finally, the general significance of the present findings for other materials is discussed.